12th IKZ Summer School 2020:
'Fundamentals of Vapor-phase Thin Film Deposition' / 07. - 08. September 2020

2020 summerschool titel www

Montag, 07. September - Dienstag, 08. September 2020


Leibniz-Institut für Kristallzüchtung (IKZ) / Max-Born-Str. 2 / 12489 Berlin


Prof. Dr. Ya-Hong Xie
MATERIALS SCIENCE AND ENGINEERING Department, UCLA Samueli School of Engineering, Los Angeles, USA

Die Summer School findet in englischer Sprache statt.



Inhalt der Summer School

Fundamentals of Vapor-phase Thin Film Deposition

Session 1:

  • Elementary thermodynamics on the physical phases of matter: entropy vs enthalpy
  • Introduction to gas kinetics
  • Transport properties (mass, energy and momentum) in gas phase
  • Introduction to vacuum technology;
  • Deposition from solid source: physical vapor deposition (PVD)
  • On solid-vapor (liquid-vapor) equilibrium and deviation from equilibrium: evaporation and deposition being “the two sides of the same coin

Session 2:

  • The growths of compounds and alloys and the concept of single-phase field
  • Uniformity considerations
  • The types of evaporation sources and rate control fundamentals
  • Dynamics of adatoms
  • The concept of surface energy
  • Nucleation in 2D and 3D
  • Morphological evolution of thin films

Session 3:

  • The growths of single crystals: epitaxy
  • Crystalline defects
  • Chemical vapor deposition (CVD): typical components of a growth system
  • Pros and cons of CVD vs PVD
  • Precursor kinetics
  • Thermodynamic considerations of chemical reactions
  • Reaction rates
  • Different regimes of CVD processes

Session 4 - Selected topics on the application of thin films:

  • Protection film: intrinsic & extrinsic stress, film delamination
  • Semiconductor technology:
    o    Doping profile control considerations, e.g. microwave diodes
    o    Heterostructure, e.g. HBTs: commensurate vs incommensurate
    o    Strained structure fabrication, e.g. Si IC, GaN: misfit strain, dislocation kinetics, etc.
    o    Pertinence to 5G communication


Bilder summerschool2020 www

Anmeldung Summer School

  • Die Sommer School richtet sich sowohl an Mitarbeiter des Leibniz-Instituts für Kristallzüchtung als auch an Mitarbeiter, vorzugsweise Studenten und Doktoranden, anderer Einrichtungen.
    Bitte melden Sie sich per Email unter Diese E-Mail-Adresse ist vor Spambots geschützt! Zur Anzeige muss JavaScript eingeschaltet sein!, mit Angabe Ihrer Einrichtung und Position (z.B. Student Bachelor / Master / Fachrichtung, PhD, Scientist u.s.w.) an. Bitte beachten Sie, dass die Anzahl der Teilnehmer für die Summer School auf max. 50 Teilnehmer beschränkt ist.
  • Die Teilnahme an der Summer School ist kostenlos.
    Kosten für Anreise, Unterkunft und Verpflegung der Teilnehmer wird nicht vom IKZ übernommen und ist von den Teilnehmern selbst zu tragen.

    Anmeldeschluss: 28.08.2019

Kontakt Summer School

Fachlicher Ansprechpartner:

Prof. Dr. Ya-Hong Xie
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Tel:     (310) 825-2971

Ansprechpartner Organisation:

Stefanie Grüber
Leibniz-Institut für Kristallzüchtung (IKZ)
Max-Born-Str. 2
12489 Berlin
Telefon: +49-30-6392-3263
Fax: +49-30-6392-3003
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Zeitplan Summer School

  • Montag, 07. September 2019, 10.00 - 12:00 Uhr:
    Montag, 07. September 2019, 13.00 - 15:00 Uhr:

  • Dienstag, 08. September 2019, 10.00 - 12:00 Uhr:
    Dienstag, 08. September 2019, 13.00 - 15:00 Uhr:

CV Dozent Ya-Hong Xie

Ya Hong Xie

Ya-Hong Xie (SM’99) obtained the B.Sc. degree in physics from Purdue University, West Lafayette, IN, in 1981, and the M.Sc. and Ph.D. degrees in electrical engineering from the University of California at Los Angeles (UCLA), in 1983 and 1986, respectively.

He was a member of the technical staff in the Physical Sciences and Engineering Research Division, Bell Laboratories from 1986 till 1999. In 1999, he joined the faculty of UCLA as a Professor in the Department of Materials Science and Engineering where he currently serves as vice chair. He has authored and coauthored over 190 technical articles and is the holder of 38 US patents as well as a number of patents of other countries including Korea, Japan and China. His current research interests include plasmon resonance and neural network enabled bio-sensing, and lattice mismatched heterostructures including group III nitrides.

Dr. Xie is a fellow of IEEE. He is the winner of 2012 Research Award of Alexander von Humboldt Foundation and Inventor Recognition Award of Semiconductor Research Corporation. He had been a visiting scientist of IHP, the Leibniz Association Germany Institut für Innovative Mikroelektronik, and is a nominator for the prestigious Japan Prize Foundation. He is an active member of the science and technology community spanning the fields of semiconductor and biomedical. He served as the Chair of the Electronic Materials Committee of IEEE Electron Device Society (2016-2018).




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